4020系列BIRD功率傳感器原理結構

感應器把某種形式的能量轉換成另一種形式的能量。有兩類:有源的和無源的。

有源感應器能將一種能量形式直接轉變成另一種，不需要外接的能源或激勵源。

無源感應器不能直接轉換能量形式，但它能控制從另一輸入端輸入的能量或激勵能，感應器承擔將某個對象或過程的特定特性轉換成數量的工作。其"對象"可以是固體、液體或氣體，而它們的狀態可以是靜態的，也可以是動態(即過程)的。對象特性被轉換量化后可以通過多種方式檢測。對象的特性可以是物理性質的，也可以是化學性質的。按照其工作原理，它將對象特性或狀態參數轉換成可測定的電學量，然后將此電信號分離出來，送入感應器系統加以評測或標示。適用于半導體的生產和科研領域，讀 數誤差+/-3%

● 采用液晶背光顯示，可對正反向功率 及駐波比等進行三位半數字顯示

● 功率測試范圍可人工或自動設置，并有 GPIB和RS-232接口供選擇

功率范圍: 100mW-10kW

頻率范圍: 100kHz-2.5GHz

駐波比范圍: 1.0-199.9

讀數誤差: ±3%

功能: 測量正反向功率，通過W和dBm顯示:測量駐波比及回波損耗，通過dB顯示; 以及測量最大最小值 顯示: 三位半液晶背光顯示

工作電源: AC和電池兩種，115/230AC，50/60Hz或8節1.2V鎳鎘電池

尺寸: 312X309X108mm

接口選項: IEEE-488接口或RS-232接口

BIRD(鳥牌)4421功率計

Precision Power Meter for Semiconductor Processing Applications

• ±1% uracy - plished through the use of sensors with an

automatic frequency compensation scheme, where the error contributions

due to directional coupler frequency response characteristics are

eliminated.

• Wide Dynamic Range - The instrument will meet the full uracy

specification over a 35 dB dynamic range.

• Excellent Measurement Repeatability - Typically <0.1%

• Digital Display - Along with automatic VSWR calculation

• Computer Interface - RS-232 and IEEE-488 standard

The Bird® Model 4421 is a precision RF power meter that, while

originally intended for general purpose laboratory applications where

high uracy is required, has found wide eptance in semiconductor

processing applications. The product is configured as a system,

consisting of the Model 4421 digital display and a precision power

sensor selected for the application based upon maximum power

and operating frequency.

MODEL 4421 MULTIFUNCTION POWER METER

Power Range: 100 mW to 25 kW FS

Frequency Range : 100 kHz - 1 GHz

VSWR Range: 1.0 - 199.9

4020系列BIRD功率傳感器原理結構

Functions : Forward and reflected power in W or dBm, VSWR,

return loss in dB and min./max. values

Overrange : Audible warning when RF power input exceeds

120% of sensor's maximum power range

Indication Display: 3 1/2 digit-liquid crystal display with indicator

for mode, measurement units, battery condition,

programming status, and trend arrows.

Switchable backlight.

Operating Power : 115/230 VAC, 50/60 Hz or 8 nickel metal hydride

1.2 V cells (NEDA type 10014)

Nominal Size : 12 9/32" L x 12 5/32" W x 4 1/4" H

(312 mm x 309 mm x 108 mm)

with handle extended 15 7/16" L (392 mm)

Weight : 11 lbs. (5 kg.)

Interconnects: 1 meter latch-n-lock coiled cable

Interfaces: IEEE-488 and RS-232 standard

Dimensions : 4 1/2" x 6 1/2" (114 x 165 mm)

Required Product: RF Power Sensor

essories: Case 4300A215 (page 43)

19" Panel Mount Kit 4421-250

Latch & Lock Case 4421-038